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This page is a summary of: Resistivity Measurement of P<sup>+</sup>-Implanted 4H-SiC Samples Prepared at Different Implantation and Annealing Temperatures Using Terahertz Time-Domain Spectroscopic Ellipsometry, Materials Science Forum, July 2020, Trans Tech Publications,
DOI: 10.4028/www.scientific.net/msf.1004.272.
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