All Stories

  1. High-Aspect-Ratio Micropatterning Capabilities into Thick Resist Layers Using Deep X-ray Lithography at SyLMAND

    Article • Synchrotron Radiation News, July 2019, Taylor & Francis

    Sven Achenbach

  2. SyLMAND: a microfabrication beamline with wide spectral and beam power tuning range at the Canadian Light Source

    Article • Journal of Synchrotron Radiation, February 2019, International Union of Crystallography

    Sven Achenbach

  3. Polymer-based X-ray masks patterned by direct laser writing

    Article • Review of Scientific Instruments, November 2018, American Institute of Physics

    Professor Andreas Mandelis, Sven Achenbach

  4. Characterization of the Surface Contamination of Deep X-Ray Lithography Mirrors

    Article • Journal of Synchrotron Radiation, April 2018, International Union of Crystallography

    Sven Achenbach