All Stories

  1. Electron power absorption dynamics in a low pressure radio frequency driven capacitively coupled discharge in oxygen
  2. Revisiting the origin of magnetic anisotropy in the permalloy single crystal
  3. On the role of metastables in capacitively coupled oxygen discharges
  4. Dual-frequency capacitively coupled chlorine discharge
  5. Ion Energy and Angular Distributions in a Dual-Frequency Capacitively Coupled Chlorine Discharge
  6. On the road to self-sputtering in high power impulse magnetron sputtering: particle balance and discharge characteristics
  7. On sheath energization and Ohmic heating in sputtering magnetrons
  8. Gas rarefaction and the time evolution of long high-power impulse magnetron sputtering pulses
  9. On the film density using high power impulse magnetron sputtering
  10. Electrical and structural properties of ultrathin polycrystalline and epitaxial TiN films grown by reactive dc magnetron sputtering
  11. Ionized physical vapor deposition (IPVD): A review of technology and applications