What is it about?
An overview on the application thin films based on silicon carbide in diodes, transistors and sensors.
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Why is it important?
Electronic devices and sensors based on these materials exhibit high performance in harsh environments.
Perspectives
This book chapter is a good introduction for readers interested in thin film applications, especially in microelectronics.
Prof. Dr. Mariana Amorim Fraga
Universidade Presbiteriana Mackenzie
Read the Original
This page is a summary of: Applications of SiC-Based Thin Films in Electronic and MEMS Devices, October 2012, IntechOpen,
DOI: 10.5772/50998.
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