Publication
Current Status of the EUV Engineering Test Stand.
Alvin H. Leung, Daniel A. Tichenor, William C. Replogle, John E. M. Goldsmith, Glenn D. Kubiak, Richard H. Stulen, William P. Ballard, Karen L. Jefferson, Leonard E. Klebanoff, Donna J. O'Connell, John B. Wronosky, John S. Taylor, James A. Folta, Layton C. Hale, Henry N. Chapman, Donald W. Sweeney, Sang H. Lee, David T. Attwood, Kenneth A. Goldberg, Patrick Naulleau
Journal of Photopolymer Science and Technology, January 2002, Technical Association of Photopolymers, Japan
DOI: 10.2494/photopolymer.15.351