Advances in Powder-based Technologies for Production of High-Performance Sputtering Targets

What is it about?

The quality of thin films depends on the target from which the film is sputtered. Despite a lot of publications on thin-film sputtering, it is not clear how the target manufacturing process affects the quality of the films. Here, we go through literature to establish the relationship between the powder manufacturing technologies and the properties of sputtered thin films. Powder metallurgy presents an exciting opportunity for producing targets for high-performance thin-film sputtering such as high entropy coatings.

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