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This page is a summary of: Impacts of CF$^{+}$, CF$_{2}$$^{+}$, CF$_{3}$$^{+}$, and Ar Ion Beam Bombardment with Energies of 100 and 400 eV on Surface Modification of Photoresist, Japanese Journal of Applied Physics, August 2011, Japan Society of Applied Physics,
DOI: 10.1143/jjap.50.08je05.
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