Introduction to Semiconductor Manufacturing Technology, Second Edition

What is it about?

IC chip manufacturing processes, such as photolithography, etch, CVD, PVD, CMP, ion implantation, RTP, inspection, and metrology, are complex methods that draw upon many disciplines. Introduction to Semiconductor Manufacturing Technologies, Second Edition thoroughly describes the complicated processes with minimal mathematics, chemistry, and physics; it covers advanced concepts while keeping the contents accessible to readers without advanced degrees. Designed as a textbook for college students, this book provides a realistic picture of the semiconductor industry and an in-depth discussion of IC chip fabrication technology. The text focuses on current fabrication technologies, but older technologies are discussed for historical context.

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Why is it important?

The textbook is wide used in universities and colleges in Taiwan and Mainland China. The Chinese translation has been designated as must-read for new engineers and technicians in world leading foundries. It uses minimum math, physics and chemistry to explain the complicated semiconductor processes and their integrations that fabricate the IC chips on the silicon wafers. It not only covers the high-k metal gate CMOS IC chips with an advanced nanometer technology node, it also covers the IC manufacturing technologies with less advanced technology node all the way back to 50 micron of1960s. Therefore readers can have a better understanding of the development of IC manufacturing technology from a historic point of view.