Publication
Uniaxial strained silicon n-FETs on silicon-germanium-on-insulator substrates with an e-Si<inf>0.7</inf>Ge<inf>0.3</inf> stress transfer layer and source/drain stressors for performance enhancement
Grace Huiqi Wang, Grace Huiqi Wang, Eng-Huat Toh, Eng-Huat Toh, Yong-Lim Foo, Yong-Lim Foo, S. Tripathy, S. Tripathy, S. Balakumar, S. Balakumar, Guo-Qiang Lo, Guo-Qiang Lo, Ganesh Samudra, Ganesh Samudra, Yee-Chia Yeo, Yee-Chia Yeo
January 2007, Institute of Electrical & Electronics Engineers (IEEE)
DOI: 10.1109/essderc.2007.4430940