What is it about?
This paper deals with the numerical modelling of 3D structure of surface micromachined (MEMS) accelerometers.
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Why is it important?
Keeping knowledge about predefined accelerometer structure we start computer simulation procedure leading to final structure design, then to be defined as a basic structure for object oriented models.
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This page is a summary of: Complex mathematical models of comb drive accelerometers, September 2007, Institute of Electrical & Electronics Engineers (IEEE),
DOI: 10.1109/acemp.2007.4510533.
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