What is it about?
The present paper describes a new method, called charge-extraction technique, for studying the surface states in MOS devices. This new technique utilizes the substrate current arising from the non-steady-state emission of carriers from the surface states instead of that arising from their steady-state re-combination as utilized in the charge-pumping method and this is achieved by confining the amplitude of the gate-voltage signal to such a magnitude that the surface region of the device does not cross the depletion limits.
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Why is it important?
A new theoretical model is developed for the present case which predicts the occurrence of a maximum value of the substrate current at a certain optimum frequency of the applied gate-voltage signal. Experimental measurements have been found quite in conformity with the theoretical model.
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This page is a summary of: Charge-extraction technique for studying the surface states in MOS devices, IEEE Transactions on Electron Devices, May 1993, Institute of Electrical & Electronics Engineers (IEEE),
DOI: 10.1109/16.210200.
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