What is it about?
Optical methods for measurements of surface roughness become increasingly popular. In this report, three optical methods are compared, and the conditions for validity of each methods is discussed. Further the different surface roughness parameters are compared.
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Why is it important?
Optical methods for surface roughness assessment are potentially much faster than mechanical probe methods. However, it is very important to be aware of the roughness ranges where these methods are applicable. In this paper, the correlations between the most common surface roughness parameters are determined, and validated by measurements on real samples.
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This page is a summary of: Comparison of optical methods for surface roughness characterization, Measurement Science and Technology, July 2015, Institute of Physics Publishing,
DOI: 10.1088/0957-0233/26/8/085208.
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