What is it about?
This paper proposed a new scheme based on accelerator generation of short wavelength, high-power light sources. It cleverly combines the advantages of high repetition rate synchrotron radiation light sources and high radiation power free electron lasers, and is expected to produce EUV light sources in the 10 kW range. Once successfully developed, this solution will completely revolutionize the existing lithography, making accelerator based lithography factories possible.
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Why is it important?
This scheme is expected to produce EUV light sources in the 10 kW range. Once successfully developed, this solution will completely revolutionize the existing lithography, making accelerator based lithography factories possible.
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Read the Original
This page is a summary of: Sustainable early-stage lasing in a low-emittance electron storage ring, Frontiers in Human Neuroscience, December 2023, American Institute of Physics,
DOI: 10.1063/5.0177748.
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