What is it about?
We have succeeded in developing an electret-type MEMS vibratory energy harvester that integrates a self-assembled electret (SAE) that does not require any charging processing in a micromechanical structure. By using the proposed technology, it will be possible to monolithically integrate electret-type MEMS energy harvesters and electronic circuits, which has been unexplored until now.
Featured Image
Photo by Salman Hossain Saif on Unsplash
Why is it important?
(1) Realization of an electret-type MEMS vibratory energy harvester that does not require any electret charging process. (2) The electret can be formed only by the film deposition process (evaporation) at room temperature. (3) Monolithic integration of MEMS and electronic circuits can also be possible.
Perspectives
Read the Original
This page is a summary of: MEMS post-processed self-assembled electret for vibratory energy harvesters, Applied Physics Letters, December 2021, American Institute of Physics,
DOI: 10.1063/5.0072596.
You can read the full text:
Contributors
The following have contributed to this page