What is it about?
We report the changes in mechanical properties observed in graded TiN thin films and compare with conventional films produced by the GAMS sputtering technique.
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Why is it important?
TiN thin films are used in many technological applications, for example, in coating tool steels or in protecting metallic surfaces from corrosion, the use of grade N microstructures allow to improve the properties of the film, opening a new opportunity of application
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This page is a summary of: Mechanical properties of homogeneous and nitrogen graded TiN thin films, Thin Solid Films, September 2020, Elsevier,
DOI: 10.1016/j.tsf.2020.138268.
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