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Amorphous indium–gallium–zinc-oxide (a-IGZO) thin films were deposited using RF magnetron sputtering on polyethylene naphthalate (PEN) and polyethylene terephthalate (PET) substrates. Their mechanical flexibility was investigated using uniaxial tensile and buckling tests coupled with in situ optical microscopy. The crack onset strain for a-IGZO/PEN was slightly higher than that of a-IGZO/PET. Crack onset strains were greater for compressive flexure than for tensile flexure. These results provide useful information on the mechanical reliability of a-IGZO films for the development of flexible electronics.
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This page is a summary of: Mechanical properties of amorphous indium–gallium–zinc oxide thin films on compliant substrates for flexible optoelectronic devices, Thin Solid Films, November 2015, Elsevier,
DOI: 10.1016/j.tsf.2015.09.052.
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