What is it about?
This chapter explores how low-temperature atomic layer deposition enhances semiconductor polymer fabrication, advancing modern manufacturing techniques.
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Why is it important?
This chapter is important because it discusses into the transformative impact of low-temperature atomic layer deposition on semiconductor polymer fabrication, revolutionizing modern manufacturing processes.
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This page is a summary of: Low-temperature atomic layer deposition as an advanced fabrication technique of semiconductor polymer materials, January 2024, Elsevier,
DOI: 10.1016/b978-0-323-95105-0.00010-3.
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