All Stories

  1. Fabrication of bio-inspired 3D nanoimprint mold using acceleration-voltage-modulation electron-beam lithography

    Article • Advanced Optical Technologies, June 2019, De Gruyter

    Dr Jun Taniguchi

  2. Toward full three-dimensional (3D) high volume fabrication

    Article • Advanced Optical Technologies, May 2019, De Gruyter

    Dr Jun Taniguchi

  3. Lifetime amelioration of release-agent-free antireflection-structured replica molds by partial-filling ultraviolet nanoimprint lithography

    Article • Japanese Journal of Applied Physics, May 2015, Japan Society of Applied Physics

    Dr Jun Taniguchi

  4. Nanoscale metal pattern-transfer technique using silver ink

    Article • Microelectronic Engineering, July 2014, Elsevier

    Dr Jun Taniguchi

  5. Super resolution technique for sub-100 nm nanoimprint mold via mechanical deformation method

    Article • Microelectronic Engineering, July 2014, Elsevier

    Dr Jun Taniguchi

  6. Electron beam direct writing of nanodot patterns on roll mold surfaces by electron beam on–off chopping control

    Article • Microelectronic Engineering, July 2014, Elsevier

    Dr Jun Taniguchi

  7. Computer generated hologram-ROM fabrication and duplication by EBL and UV-NIL

    Article • Microelectronic Engineering, July 2014, Elsevier

    Dr Jun Taniguchi

  8. Defect analysis and lifetime evaluation of a release-coated nanoimprint mold

    Article • Microelectronic Engineering, July 2014, Elsevier

    Dr Jun Taniguchi

  9. Fabrication of double-sided self-supporting antireflection-structured film by ultraviolet nanoimprint lithography

    Article • Japanese Journal of Applied Physics, May 2014, Japan Society of Applied Physics

    Dr Jun Taniguchi

  10. Fabrication of high-aspect-ratio pattern via high throughput roll-to-roll ultraviolet nanoimprint lithography

    Article • Microelectronic Engineering, December 2013, Elsevier

    Dr Jun Taniguchi

  11. Super-resolution technique for nanoimprint mold using elastic UV-curable resin

    Article • Microelectronic Engineering, October 2013, Elsevier

    Dr Jun Taniguchi

  12. Fabrication of self-supporting antireflection-structured film by UV–NIL

    Article • Microelectronic Engineering, October 2013, Elsevier

    Dr Jun Taniguchi

  13. Fabrication of antireflection structure with antifouling-effect surface by ultraviolet nanoimprint lithography

    Article • Microelectronic Engineering, October 2013, Elsevier

    Dr Jun Taniguchi

  14. Dwell time adjustment for focused ion beam machining

    Article • Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms, July 2013, Elsevier

    Dr Jun Taniguchi

  15. Nanoimprint Technology

    Article • June 2013, Wiley

    Dr Jun Taniguchi

  16. What is a Nanoimprint?

    Article • June 2013, Wiley

    Dr Jun Taniguchi

  17. Applications and Leading‐Edge Technology

    Article • June 2013, Wiley

    Dr Jun Taniguchi

  18. Ultraviolet Nanoimprint Lithography

    Article • June 2013, Wiley

    Dr Jun Taniguchi

  19. The design of ROM-type holographic memory with iterative Fourier transform algorithm

    Article • March 2013, SPIE

    Dr Jun Taniguchi

  20. Three-dimensional hologram-read-only memory duplication by nanoimprint lithography

    Article • Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena, January 2013, American Vacuum Society

    Dr Jun Taniguchi

  21. Improving the lifespan of the cantilever during electron assisted AFM lithography

    Article • Microelectronic Engineering, October 2012, Elsevier

    Dr Jun Taniguchi

  22. Three-dimensional measurements of UV-imprint process by micro-digital holographic-PTV

    Article • Microelectronic Engineering, September 2012, Elsevier

    Dr Jun Taniguchi

  23. A technique for transferring metal nano patterns from a plastic replica mold by using a metal oxide release layer

    Article • Microelectronic Engineering, September 2012, Elsevier

    Dr Jun Taniguchi

  24. Fabrication of roll mold using electron-beam direct writing and metal lift-off process

    Article • Microelectronic Engineering, September 2012, Elsevier

    Dr Jun Taniguchi

  25. Lifetime evaluation of release agent for ultraviolet nanoimprint lithography

    Article • Microelectronic Engineering, September 2012, Elsevier

    Dr Jun Taniguchi

  26. Control of Swelling Height of Si Crystal by Irradiating Ar Beam

    Article • Journal of Nanoscience and Nanotechnology, January 2012, American Scientific Publishers

    Dr Jun Taniguchi

  27. Fabrication of Smooth and Ultra-Sharp Diamond Knives of Lower than 60 nm Tip Diameter by Low Energy Oxygen Ion Beam Machining

    Article • e-Journal of Surface Science and Nanotechnology, January 2012, Surface Science Society Japan

    Dr Jun Taniguchi

  28. High-density pattern transfer via roll-to-roll ultraviolet nanoimprint lithography using replica mold

    Article • Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena, January 2012, American Vacuum Society

    Dr Jun Taniguchi

  29. Fabrication of carbon nanofibers using only ion beam irradiation to glassy carbon

    Article • Microelectronic Engineering, August 2011, Elsevier

    Dr Jun Taniguchi

  30. Degradation of release layer on high aspect ratio mold by contact angle measurement

    Article • Microelectronic Engineering, August 2011, Elsevier

    Dr Jun Taniguchi

  31. Fabrication of the metal nano pattern on plastic substrate using roll nanoimprint

    Article • Microelectronic Engineering, August 2011, Elsevier

    Dr Jun Taniguchi

  32. Fabrication of Anti-reflection Structure using Photo-curable Polymer

    Article • Journal of Photopolymer Science and Technology, January 2011, Technical Association of Photopolymers, Japan

    Dr Jun Taniguchi

  33. Transparent Roll Mold Fabrication Method and Transfer to Photo-curable Polymer

    Article • Journal of Photopolymer Science and Technology, January 2011, Technical Association of Photopolymers, Japan

    Dr Jun Taniguchi

  34. Fabrication of a seamless roll mold using inorganic electron beam resist with postexposure bake

    Article • January 2011, American Vacuum Society

    Dr Jun Taniguchi

  35. Macro-optical inspection method for deterioration evaluation of release-coated mold surfaces for nanoimprint lithography

    Article • January 2011, American Vacuum Society

    Dr Jun Taniguchi

  36. Large-diameter roll mold fabrication method using a small-diameter quartz roll mold and UV nanoimprint lithography

    Article • January 2011, American Vacuum Society

    Dr Jun Taniguchi

  37. Three-dimensional nanoimprint lithography using photocurable resins

    Article • Plastics Rubber and Composites Macromolecular Engineering, September 2010, Taylor & Francis

    Dr Jun Taniguchi

  38. Two-tone metal pattern transfer technique using a single mold surface

    Article • Microelectronic Engineering, May 2010, Elsevier

    Dr Jun Taniguchi

  39. Evaluation of filling behavior on UV nanoimprint lithography using release coating

    Article • Microelectronic Engineering, May 2010, Elsevier

    Dr Jun Taniguchi

  40. Technique for transfer of high-density, high-aspect-ratio nanoscale patterns in UV nanoimprint lithography and measurement of the release force

    Article • Microelectronic Engineering, May 2010, Elsevier

    Dr Jun Taniguchi

  41. Three Dimensional Nanoimprint Lithography Using Inorganic Electron Beam Resist

    Article • February 2010, IntechOpen

    Dr Jun Taniguchi

  42. Fabrication Technique of Nanoimprint Mold

    Article • Journal of the Japan Society for Precision Engineering, January 2010, Japan Society for Precision Engineering

    Dr Jun Taniguchi

  43. Three-dimensional Metal Nano Pattern Transfer on PET using Metal Oxide Layer

    Article • Journal of Advanced Mechanical Design Systems and Manufacturing, January 2010, Japan Society of Mechanical Engineers

    Dr Jun Taniguchi

  44. Assessment of release properties in UV nanoimprint lithography using high-aspect-ratio nanoscale molds

    Article • January 2010, American Vacuum Society

    Dr Jun Taniguchi

  45. Electrical properties of transferred metal nanopattern using metal oxide release layer

    Article • January 2010, American Vacuum Society

    Dr Jun Taniguchi

  46. Three-Dimensional Measurements of Photo-curing Process With Photo-curable Resin for UV-Nanoimprint by Micro-digital-Holographic-PTV

    Article • Journal of Electronic Packaging, January 2010, ASME International

    Dr Jun Taniguchi

  47. Fabrication of seamless three-dimensional roll mold using direct electron-beam writing on rotating cylindrical substrate

    Article • January 2010, American Vacuum Society

    Dr Jun Taniguchi

  48. Photo‐curable resins and evaluation methods for UV‐nanoimprint lithography

    Article • Electronics and Communications in Japan, October 2009, Wiley

    Dr Jun Taniguchi

  49. Surface deformation of Ar+ ion collision process via molecular dynamics simulation with comparison to experiment

    Article • Journal of Applied Physics, August 2009, American Institute of Physics

    Dr Jun Taniguchi

  50. Nanoprint lithography of gold nanopatterns on polyethylene terephthalate

    Article • Microelectronic Engineering, April 2009, Elsevier

    Dr Jun Taniguchi

  51. Filling behavior of UV nanoimprint resin observed by using a midair structure mold

    Article • Microelectronic Engineering, April 2009, Elsevier

    Dr Jun Taniguchi

  52. Observation of UV Nanoimprint Lithography Process by Micro-Digitalholographic-PTV

    Article • January 2009, ASME International

    Dr Jun Taniguchi

  53. Desktop Type Equipment of Thermal-assisted UV Roller Imprinting

    Article • Journal of Photopolymer Science and Technology, January 2009, Technical Association of Photopolymers, Japan

    Dr Jun Taniguchi

  54. Release Properties and Durability of Release Layer on UV Nanoimprint Lithography

    Article • Journal of Photopolymer Science and Technology, January 2009, Technical Association of Photopolymers, Japan

    Dr Jun Taniguchi

  55. Fabrication of Non Reflective Structure on Glassy Carbon Surface Using Oxygen Ion Beam Irradiation

    Article • Journal of Nanoscience and Nanotechnology, January 2009, American Scientific Publishers

    Dr Jun Taniguchi

  56. Filling Behavior Observation on UV Nanoimprint Lithography

    Article • Journal of Photopolymer Science and Technology, January 2009, Technical Association of Photopolymers, Japan

    Dr Jun Taniguchi

  57. Effect of Post Exposure Bake in Inorganic Electron Beam Resist and Utilizing for Nanoimprint Mold

    Article • Journal of Nanoscience and Nanotechnology, January 2009, American Scientific Publishers

    Dr Jun Taniguchi

  58. Fabrication of nanodot array molds by using an inorganic electron-beam resist and a postexposure bake

    Article • January 2009, American Vacuum Society

    Dr Jun Taniguchi

  59. Fabrication of a seamless roll mold by direct writing with an electron beam on a rotating cylindrical substrate

    Article • January 2009, American Vacuum Society

    Dr Jun Taniguchi

  60. Three-dimensional measurements of photo curing with process with photo-curable resin for UV-nanoimprint by micro-digital-holographic-PTV

    Article • December 2008, Institute of Electrical & Electronics Engineers (IEEE)

    Dr Jun Taniguchi

  61. Fabrication of the nanoimprint mold using inorganic electron beam resist with post exposure bake

    Article • Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena, November 2008, American Vacuum Society

    Dr Jun Taniguchi

  62. Analysis on microstructure of interface layer in DLC/Si structures produced by FIB–CVD

    Article • Diamond and Related Materials, July 2008, Elsevier

    Dr Jun Taniguchi

  63. Highly charged ion beam applied to lithography technique (invited)

    Article • Review of Scientific Instruments, February 2008, American Institute of Physics

    Dr Jun Taniguchi

  64. Ion beam lithography by using highly charged ion beam of Ar

    Article • Colloids and Surfaces A Physicochemical and Engineering Aspects, February 2008, Elsevier

    Dr Jun Taniguchi

  65. Water-Evaporation Characteristics of Nano-Structure Surface

    Article • January 2008, ASME International

    Dr Jun Taniguchi

  66. Quantum Molecular Dynamics Study on Energy Transfer to the Secondary Electron in Surface Collision Process of an Ion

    Article • Journal of Thermal Science and Technology, January 2008, Japan Society of Mechanical Engineers

    Dr Jun Taniguchi

  67. Sub-micrometer-scale patterning on Zr-based metallic glass using focused ion beam irradiation and chemical etching

    Article • Nanotechnology, August 2007, Institute of Physics Publishing

    Dr Jun Taniguchi

  68. Fabrication of three-dimensional nanoimprint mold using inorganic resist in low accelerating voltage electron beam lithography

    Article • Microelectronic Engineering, May 2007, Elsevier

    Dr Jun Taniguchi

  69. Improving the sensitivity and line edge roughness in inorganic positive electron beam resist

    Article • Microelectronic Engineering, May 2007, Elsevier

    Dr Jun Taniguchi

  70. Internal structure transition of spin-on glass by electron beam irradiation

    Article • Applied Surface Science, April 2007, Elsevier

    Dr Jun Taniguchi

  71. Quantum Molecular Dynamics Study on Energy Transfer to the Secondary Electron in Surface Collision Process of an Ion

    Article • January 2007, ASME International

    Dr Jun Taniguchi

  72. Sub-100-nm three-dimensional nanoimprint lithography

    Article • January 2007, American Vacuum Society

    Dr Jun Taniguchi

  73. Depth control of a silicon structure fabricated by 100qkeV Ar ion beam lithography

    Article • Applied Surface Science, January 2007, Elsevier

    Dr Jun Taniguchi

  74. 光ナノインプリント用光硬化性樹脂とその特性評価法

    Article • IEEJ Transactions on Electronics Information and Systems, January 2007, Institute of Electrical Engineers of Japan (IEE Japan)

    Dr Jun Taniguchi

  75. Rapid nanopatterning of a Zr-based metallic glass surface utilizing focused ion beam induced selective etching

    Article • Frontiers in Human Neuroscience, October 2006, American Institute of Physics

    Dr Jun Taniguchi

  76. Fabrication of Three-Dimensional Hydrogen Silsesquioxane Resist Structure using Electron Beam Lithography

    Article • Japanese Journal of Applied Physics, June 2006, Japan Society of Applied Physics

    Dr Jun Taniguchi

  77. Measurements of 3D flow in a micro-pipe via micro digital holographic particle tracking velocimetry

    Article • Measurement Science and Technology, June 2006, Institute of Physics Publishing

    Dr Jun Taniguchi

  78. Ion-beam processing of single crystal diamond using SOG mask

    Article • Vacuum, May 2006, Elsevier

    Dr Jun Taniguchi

  79. Rapid and three-dimensional nanoimprint template fabrication technology using focused ion beam lithography

    Article • Microelectronic Engineering, April 2006, Elsevier

    Dr Jun Taniguchi

  80. Ion-beam lithography by use of highly charged Ar-ion beam

    Article • Review of Scientific Instruments, March 2006, American Institute of Physics

    Dr Jun Taniguchi

  81. Thermal Desorption Development of Spin-On Glass for Electron Beam Nanolithography

    Article • Japanese Journal of Applied Physics, January 2006, Japan Society of Applied Physics

    Dr Jun Taniguchi

  82. Optimization of Processing Condition for Deposition of DLC Using FIB-CVD Method

    Article • JSME International Journal Series C, January 2006, Japan Society of Mechanical Engineers

    Dr Jun Taniguchi

  83. Etching characteristics of a silicon surface induced by focused ion beam irradiation

    Article • International Journal of Manufacturing Technology and Management, January 2006, Inderscience Publishers

    Dr Jun Taniguchi

  84. Three-Dimensional Nanofabrication Utilizing Selective Etching of Silicon Induced by Focused Ion Beam Irradiation

    Article • JSME International Journal Series C, January 2006, Japan Society of Mechanical Engineers

    Dr Jun Taniguchi

  85. ディジタルホログラフィを用いたマイクロ流れの高時間分解三次元計測に関する研究

    Article • TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series B, January 2006, Japan Society of Mechanical Engineers

    Dr Jun Taniguchi

  86. Three-Dimensional Flow Tracking in a Micro Channel with High Time Resolution Using Micro Digital-Holographic Particle-Tracking Velocimetry

    Article • Optical Review, November 2005, Springer Science + Business Media

    Dr Jun Taniguchi

  87. Fabrication of Low Line Edge Roughness Mold by Spin On Glass (SOG) Replica Method

    Article • Japanese Journal of Applied Physics, July 2005, Japan Society of Applied Physics

    Dr Jun Taniguchi

  88. Influence of Heat Treatment on Mechanical Properties of DLC Deposited by FIB-CVD

    Article • JSME International Journal Series A, January 2005, Japan Society of Mechanical Engineers

    Dr Jun Taniguchi

  89. Investigation of Application Availability of UV-NIL by Using Several Types of Photo-curable Resin

    Article • Journal of Photopolymer Science and Technology, January 2005, Technical Association of Photopolymers, Japan

    Dr Jun Taniguchi

  90. Research on Field Electron Emission from Diamond

    Article • Journal of the Japan Society for Precision Engineering Contributed Papers, January 2005, Japan Society for Precision Engineering

    Dr Jun Taniguchi

  91. Microstructure Analysis of Diamond-Like Carbon Produced by Focused Ion Beam Assisted Chemical Vapor Deposition

    Article • Journal of the Japan Society for Precision Engineering Contributed Papers, January 2005, Japan Society for Precision Engineering

    Dr Jun Taniguchi

  92. ＦＩＢ‐ＣＶＤ法によるＤＬＣ成形プロセスとその特性評価

    Article • Journal of the Society of Materials Science Japan, January 2005, Society of Materials Science, Japan

    Dr Jun Taniguchi

  93. 3D imprint technology using substrate voltage change

    Article • Applied Surface Science, November 2004, Elsevier

    Dr Jun Taniguchi

  94. Fabrication of Low Line Edge Roughness Mold for Photo-Nanoimprint

    Article • Japanese Journal of Applied Physics, June 2004, Japan Society of Applied Physics

    Dr Jun Taniguchi

  95. XPS studies on damage evaluation of single-crystal diamond chips processed with ion beam etching and reactive ion beam assisted chemical etching

    Article • Diamond and Related Materials, January 2004, Elsevier

    Dr Jun Taniguchi

  96. 3D Micro-Fabrication using Combination Technique of Nano-Scale Processing and Chemical Etching (2nd Report, Possibility of 3D Micro-Fabrication using Focused Ion Beam Process)

    Article • TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series C, January 2004, Japan Society of Mechanical Engineers

    Dr Jun Taniguchi

  97. Elimination of Pattern Defects of Nanoimprint under Atmospheric Conditions

    Article • Japanese Journal of Applied Physics, June 2003, Japan Society of Applied Physics

    Dr Jun Taniguchi

  98. Evaluation of Line Edge Roughness in Nanoimprint Lithography Using Photocurable Polymer

    Article • Japanese Journal of Applied Physics, June 2003, Japan Society of Applied Physics

    Dr Jun Taniguchi

  99. Diamond nanoimprint lithography

    Article • Nanotechnology, September 2002, Institute of Physics Publishing

    Dr Jun Taniguchi

  100. Uniformity in Patterns Imprinted Using Photo-Curable Liquid Polymer

    Article • Japanese Journal of Applied Physics, June 2002, Japan Society of Applied Physics

    Dr Jun Taniguchi

  101. Improvement of Imprinted Pattern Uniformity Using Sapphire Mold

    Article • Japanese Journal of Applied Physics, June 2002, Japan Society of Applied Physics

    Dr Jun Taniguchi

  102. Direct Etching of Spin-on-Glass Films Exposed Using Synchrotron Radiation

    Article • Japanese Journal of Applied Physics, June 2002, Japan Society of Applied Physics

    Dr Jun Taniguchi

  103. Measurement of Adhesive Force Between Mold and Photocurable Resin in Imprint Technology

    Article • Japanese Journal of Applied Physics, June 2002, Japan Society of Applied Physics

    Dr Jun Taniguchi

  104. Imprint Characteristics by Photo-Induced Solidification of Liquid Polymer

    Article • Japanese Journal of Applied Physics, December 2000, Japan Society of Applied Physics

    Dr Jun Taniguchi

  105. Preparation of Diamond Mold Using Electron Beam Lithography for Application to Nanoimprint Lithography

    Article • Japanese Journal of Applied Physics, December 2000, Japan Society of Applied Physics

    Dr Jun Taniguchi

  106. Field emission from electron-beam-irradiated bulk diamond

    Article • Applied Surface Science, May 1999, Elsevier

    Dr Jun Taniguchi

  107. Focused-ion-beam-assisted etching of diamond in XeF[sub 2]

    Article • Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena, July 1998, American Vacuum Society

    Dr Jun Taniguchi

  108. Electron Beam Assisted Chemical Etching of Single-Crystal Diamond Substrates with Hydrogen Gas

    Article • Japanese Journal of Applied Physics, December 1997, Japan Society of Applied Physics

    Dr Jun Taniguchi

  109. Utilizing of hydrocarbon contamination for prevention of the surface charge-up at electron-beam assisted chemical etching of a diamond chip

    Article • Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms, January 1997, Elsevier

    Dr Jun Taniguchi

  110. Electron Beam Assisted Chemical Etching of Single Crystal Diamond Substrates

    Article • Japanese Journal of Applied Physics, December 1996, Japan Society of Applied Physics

    Dr Jun Taniguchi

  111. 酸素ガスを用いたダイヤモンドの電子ビーム援用化学加工(第1報)

    Article • Journal of the Japan Society for Precision Engineering, January 1996, Japan Society for Precision Engineering

    Dr Jun Taniguchi

  112. Electron Beam Assisted Etching of Single Crystal Diamond Chips

    Article • MRS Proceedings, January 1994, Springer Science + Business Media

    Dr Jun Taniguchi