All Stories

  1. So, You Want to Have a Nanofab? Shared-Use Nanofabrication and Characterization Facilities: Cost-of-Ownership, Toolset, Utilization, and Lessons Learned

    Article • Journal of Research of the National Institute of Standards and Technology, February 2020, National Institute of Standards and Technology (NIST)

    Dr James Alexander Liddle

  2. The Self-Report Delinquency Scale From the National Longitudinal Study of Adolescent to Adult Health Among At-Risk for Delinquency Youths

    Article • Violence and Victims, February 2019, Springer Publishing Company

    Dr James Alexander Liddle

  3. The Self-Report Delinquency Scale From the National Longitudinal Study of Adolescent to Adult Health Among At-Risk for Delinquency Youths

    Article • Violence and Victims, February 2019, Springer Publishing Company

    Dr James Alexander Liddle

  4. Nanoscale deformation in polymers revealed by single-molecule super-resolution localization–orientation microscopy

    Article • Materials Horizons, January 2019, Royal Society of Chemistry

    Dr James Alexander Liddle

  5. Aligned carbon nanotube morphogenesis predicts physical properties of their polymer nanocomposites

    Article • Nanoscale, January 2019, Royal Society of Chemistry

    Dr James Alexander Liddle

  6. Nanoparticle Manufacturing – Heterogeneity through Processes to Products

    Article • ACS Applied Nano Materials, August 2018, American Chemical Society (ACS)

    Dr James Alexander Liddle

  7. Research Update: Electron beam-based metrology after CMOS

    Article • APL Materials, July 2018, American Institute of Physics

    Dr James Alexander Liddle

  8. J. Alexander Liddle: Metrology at the nanoscale key to understanding of next generation lithography processes

    Article • SPIE Newsroom, July 2017, SPIE

    Dr James Alexander Liddle

  9. Molecular Precision at Micrometer Length Scales: Hierarchical Assembly of DNA–Protein Nanostructures

    Article • ACS Nano, July 2017, American Chemical Society (ACS)

    Dr James Alexander Liddle

  10. Guiding the Self-Assembly of RecA Proteinfilaments on DNA Scaffolds to Create Rationally Designed Nanostructures

    Article • Biophysical Journal, February 2017, Elsevier

    Dr James Alexander Liddle

  11. Assessing fabrication tolerances for a multilevel 2D binary grating for 3D multifocus microscopy

    Article • Optics Express, April 2016, Optical Society of America (OSA)

    Dr James Alexander Liddle

  12. Nanomanufacturing: A Perspective

    Article • ACS Nano, February 2016, American Chemical Society (ACS)

    Dr James Alexander Liddle

  13. Gravitational Sweep Sedimentation Velocity

    Article • Biophysical Journal, February 2016, Elsevier

    Dr James Alexander Liddle

  14. High-Resolution Imaging and Spectroscopy at High Pressure: A Novel Liquid Cell for the Transmission Electron Microscope

    Article • Microscopy and Microanalysis, December 2015, Cambridge University Press

    Dr James Alexander Liddle

  15. Dielectric Characterization by Microwave Cavity Perturbation Corrected for Nonuniform Fields

    Article • IEEE Transactions on Microwave Theory and Techniques, September 2014, Institute of Electrical & Electronics Engineers (IEEE)

    Dr James Alexander Liddle

  16. High-speed, high-purity separation of gold nanoparticle–DNA origami constructs using centrifugation

    Article • Soft Matter, July 2014, Royal Society of Chemistry

    Dr James Alexander Liddle

  17. Innenrücktitelbild: Quantum-Dot Fluorescence Lifetime Engineering with DNA Origami Constructs (Angew. Chem. 4/2013)

    Article • Angewandte Chemie International Edition, January 2013, Wiley

    Dr James Alexander Liddle

  18. Quantum-Dot Fluorescence Lifetime Engineering with DNA Origami Constructs

    Article • Angewandte Chemie, December 2012, Wiley

    Dr James Alexander Liddle

  19. Quantum-Dot Fluorescence Lifetime Engineering with DNA Origami Constructs

    Article • Angewandte Chemie International Edition, December 2012, Wiley

    Dr James Alexander Liddle

  20. DNA evolves

    Article • Materials Today, December 2012, Elsevier

    Dr James Alexander Liddle

  21. Lithography, metrology and nanomanufacturing

    Article • Nanoscale, January 2011, Royal Society of Chemistry

    Dr James Alexander Liddle

  22. The innovator's non‐dilemma: the case of next‐generation lithography

    Article • Managerial and Decision Economics, July 2008, Wiley

    Dr James Alexander Liddle

  23. Available in print

    Article • Nature Nanotechnology, September 2007, Springer Science + Business Media

    Dr James Alexander Liddle

  24. Soft X-Ray Microscopy of Nanomagnetism

    Article • ChemInform, August 2006, Wiley

    Dr James Alexander Liddle

  25. New Overlay Technique for Fabrication of 15nm Zone Plates

    Article • January 2006, Optical Society of America (OSA)

    Dr James Alexander Liddle

  26. EUV focus sensor: design and modeling

    Article • May 2005, SPIE

    Dr James Alexander Liddle, Dr. Kenneth A Goldberg

  27. Fabrication of platinum nanoparticles and nanowires by electron beam lithography (EBL) and nanoimprint lithography (NIL): comparison of ethylene hydrogenation kinetics

    Article • Catalysis Letters, April 2005, Springer Science + Business Media

    Dr James Alexander Liddle

  28. Nonaqueous development of silsesquioxane electron beam resist

    Article • Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena, January 2004, American Vacuum Society

    Dr James Alexander Liddle

  29. Probe shape measurement in an electron beam lithography system

    Article • Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena, January 2004, American Vacuum Society

    Dr James Alexander Liddle

  30. Euv system optimization and advanced lithography research at Lawrence Berkeley National Laboratory

    Article • January 2004, Institute of Electrical & Electronics Engineers (IEEE)

    Dr James Alexander Liddle

  31. Resist Requirements and Limitations for Nanoscale Electron-Beam Patterning

    Article • MRS Proceedings, January 2002, Cambridge University Press

    Dr James Alexander Liddle

  32. Mask-membrane impact on image blur in SCALPEL

    Article • Microelectronic Engineering, September 2001, Elsevier

    Dr James Alexander Liddle

  33. Mask blank fabrication, pattern transfer, and mounting distortion simulations for the 8-in. format SCALPEL mask

    Article • Microelectronic Engineering, September 2001, Elsevier

    Dr James Alexander Liddle

  34. SCALPEL mask parametric study

    Article • January 2001, SPIE

    Dr James Alexander Liddle

  35. Thermomechanical modeling of the SCALPEL mask during exposure

    Article • July 2000, SPIE

    Dr James Alexander Liddle

  36. Global space charge effect in SCALPEL

    Article • Microelectronic Engineering, June 2000, Elsevier

    Dr James Alexander Liddle

  37. Thermal distortion predictions of a silicon wafer during exposure in a SCALPEL tool

    Article • Microelectronic Engineering, June 2000, Elsevier

    Dr James Alexander Liddle

  38. Modeling of laminar e-beam source for SCALPEL

    Article • November 1999, SPIE

    Dr James Alexander Liddle

  39. Finite element modeling of SCALPEL masks

    Article • June 1999, SPIE

    Dr James Alexander Liddle

  40. Stress mapping techniques for the SCALPEL mask membrane system

    Article • June 1999, SPIE

    Dr James Alexander Liddle

  41. Space-charge results from the SCALPEL proof-of-concept system

    Article • June 1999, SPIE

    Dr James Alexander Liddle

  42. SCALPEL mask defect imaging analysis

    Article • Microelectronic Engineering, May 1999, Elsevier

    Dr James Alexander Liddle

  43. Analytical model of the “Shot Noise” effect in photoresist

    Article • Microelectronic Engineering, May 1999, Elsevier

    Dr James Alexander Liddle

  44. Mask membrane distortions due to pattern transfer for electron-beam lithography (SCALPEL) masks

    Article • Microelectronic Engineering, May 1999, Elsevier

    Dr James Alexander Liddle

  45. Initial wafer heating analysis for a SCALPEL lithography system

    Article • Microelectronic Engineering, May 1999, Elsevier

    Dr James Alexander Liddle

  46. SCALPEL mask-membrane charging

    Article • Microelectronic Engineering, May 1999, Elsevier

    Dr James Alexander Liddle

  47. Pattern processing results and characteristics for SCALPEL masks

    Article • Microelectronic Engineering, May 1999, Elsevier

    Dr James Alexander Liddle

  48. Optimization of a SCALPEL® exposure tool using a diffractive image quality technique

    Article • Microelectronic Engineering, May 1999, Elsevier

    Dr James Alexander Liddle

  49. Equivalent modeling of SCALPEL mask membrane distortions

    Article • June 1998, SPIE

    Dr James Alexander Liddle

  50. Space-charge limitations to throughput in projection electron-beam lithography (SCALPEL)

    Article • Microelectronic Engineering, March 1998, Elsevier

    Dr James Alexander Liddle

  51. Electron-optics method for high-throughput in a SCALPEL system: Preliminary analysis

    Article • Microelectronic Engineering, March 1998, Elsevier

    Dr James Alexander Liddle

  52. Metrology of scattering with angular limitation projection electron lithography masks

    Article • Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena, November 1997, American Vacuum Society

    Dr James Alexander Liddle

  53. Design of a low-brightness highly uniform source for projection electron-beam lithography (SCALPEL)

    Article • September 1997, SPIE

    Dr James Alexander Liddle

  54. Electron-beam lithography

    Article • Physics World, April 1997, Institute of Physics Publishing

    Dr James Alexander Liddle

  55. Proximity Effect Correction in Projection Electron Beam Lithography (Scattering with Angular Limitation Projection Electron-Beam Lithography)

    Article • Japanese Journal of Applied Physics, December 1995, Japan Society of Applied Physics

    Dr James Alexander Liddle

  56. Error budget analysis of the SCALPEL(R) mask for sub-0.2 μm lithography

    Article • Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena, November 1995, American Vacuum Society

    Dr James Alexander Liddle

  57. Fracture Strength of Thin Ceramic Membranes

    Article • MRS Proceedings, January 1994, Springer Science + Business Media

    Dr James Alexander Liddle

  58. High-throughput projection electron-beam lithography employing SCALPEL

    Article • September 1993, SPIE

    Dr James Alexander Liddle

  59. Transport in submicrometer buried mesotaxial cobalt silicide wires

    Article • Applied Physics Letters, January 1993, American Institute of Physics

    Dr James Alexander Liddle

  60. Choice of system parameters for projection electron-beam lithography: Accelerating voltage and demagnification factor

    Article • Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena, November 1992, American Vacuum Society

    Dr James Alexander Liddle

  61. Production of x-ray mask blanks for a point source stepper

    Article • July 1992, SPIE

    Dr James Alexander Liddle

  62. FABRICATION OF NANOSTRUCTURE ARRAYS USING PROJECTION ELECTRON-BEAM LITHOGRAPHY

    Article • January 1992, Elsevier

    Dr James Alexander Liddle

  63. Sub-Micron Mesotaxial CoSi2 Wires

    Article • MRS Proceedings, January 1992, Cambridge University Press

    Dr James Alexander Liddle

  64. Mask fabrication for projection electron-beam lithography incorporating the SCALPEL technique

    Article • Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena, November 1991, American Vacuum Society

    Dr James Alexander Liddle

  65. ALLOY CARBIDE PRECIPITATION IN A HIGH COBALT-NICKEL SECONDARY HARDENING STEEL

    Article • Le Journal de Physique Colloques, November 1986, EDP Sciences

    Dr James Alexander Liddle