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The surface of standard X-ray mirror substrates is typically not perfectly flat. On the nanometric scale, there are hills and valleys that can be compensated for by depositing a thin film of variable thickness: this is what is called differential deposition. By combining differential deposition and advanced optical metrology techniques, we demonstrate that surface height errors below 1 nanometre are achievable with this method.
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This page is a summary of: X-ray mirrors with sub-nanometre figure errors obtained by differential deposition of thin WSi2 films, Journal of Synchrotron Radiation, May 2023, International Union of Crystallography,
DOI: 10.1107/s1600577523003697.
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